Laser technologies in micro-optics. Part 1. Fabrication of diffractive optical elements and photomasks with amplitude transmission
| Autor: | Victor P. Korolkov, E. A. Shakhno, Alexander G. Poleshchuk, Vadim P. Veiko, D. A. Sinev |
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| Rok vydání: | 2017 |
| Předmět: |
Amorphous silicon
Fabrication Materials science business.industry 02 engineering and technology 021001 nanoscience & nanotechnology Condensed Matter Physics Laser 01 natural sciences Automation Grayscale law.invention 010309 optics chemistry.chemical_compound Optics Transmission (telecommunications) chemistry law 0103 physical sciences Electrical and Electronic Engineering Photomask Photonics 0210 nano-technology business Instrumentation |
| Zdroj: | Optoelectronics, Instrumentation and Data Processing. 53:474-483 |
| ISSN: | 1934-7944 8756-6990 |
| DOI: | 10.3103/s8756699017050077 |
| Popis: | This paper is a review of studies carried out by the staff of the National Research University of Information Technologies, Mechanics and Optics (ITMO University, Saint-Petersburg) and the Institute of Automation and Electrometry of the Siberian Branch of the Russian Academy of Sciences (IAE SB RAS, Novosibirsk) in the field of development of laser engineering processes for the formation of the structure of diffractive optical elements (DOEs) and photomasks with amplitude binary and grayscale transmission. This paper also describes the results of the study of laser thermochemical technology for fabricating chrome DOEs and technologies for the fabrication of grayscale DOEs and photomasks based on the use of amorphous silicon and LDW glass. |
| Databáze: | OpenAIRE |
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