Applying the selective Cu electroplating technique to light-emitting diodes

Autor: Lo-Lin Chen, Shih-Chieh Hsu, Dar-Jong Lin, Cheng-Lan Lin
Rok vydání: 2014
Předmět:
Zdroj: Research on Chemical Intermediates. 40:2347-2354
ISSN: 1568-5675
0922-6168
DOI: 10.1007/s11164-014-1611-z
Popis: We successfully fabricated a predefined patterned copper (Cu) substrate for thin GaN light-emitting diodes without barriers by the selective electroplating technique. The contours of Cu bumps fabricated using different electroplating modes and parameters were measured. We observed that the average thickness diminished with increasing current density. The current density conditions to obtain the best upright structure in the process were 40 and 80 mA/cm2.
Databáze: OpenAIRE