Relative detection factor for quantification of Secondary Neutral Mass Spectrometry measurements of PbTe binary telluride
| Autor: | Attila Csik, Csaba Buga, V.E. Slynko, D.M. Zayachuk |
|---|---|
| Rok vydání: | 2019 |
| Předmět: |
010302 applied physics
Materials science Analytical chemistry Binary number 02 engineering and technology 021001 nanoscience & nanotechnology Condensed Matter Physics Mass spectrometry 01 natural sciences Surfaces Coatings and Films Ion Crystal chemistry.chemical_compound chemistry Sputtering Dimple Telluride 0103 physical sciences Ingot 0210 nano-technology Instrumentation |
| Zdroj: | Vacuum. 163:99-102 |
| ISSN: | 0042-207X |
| Popis: | Knowledge of an exact value of the relative detection factor (RDF) is important for correct quantification of measurements of Secondary Neutral Mass Spectrometry (SNMS). A special crystal ingot was grown from the vapor phase to determine this coefficient for PbTe binary telluride. Sputtering of the samples was carried out by Ar+ ions with energy of 350 eV. High structural quality of the crystal grown from vapor phase allowed minimizing the density of the surface structures forming on the sputtered surface and the dimple relief of the surface. The magnitude of RDF is determined and the analytical expression is given for its energy dependence, taking into account correction caused by the impact of the transmission factors which determine the fractions of emitted Pb and Te atoms collected into the mass spectrometer. |
| Databáze: | OpenAIRE |
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