Cross coupled beams CMOS–MEMS resonator for VHF range with enhanced electrostatic detection
| Autor: | J. Giner, E. Marigo, G. Vidal, Francesc Torres, Arantxa Uranga, Nuria Barniol, J. L. Munoz-Gamarra |
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| Rok vydání: | 2011 |
| Předmět: |
Microelectromechanical systems
Fabrication Materials science business.industry Capacitive sensing Condensed Matter Physics Atomic and Molecular Physics and Optics Computer Science::Other Surfaces Coatings and Films Electronic Optical and Magnetic Materials Cross coupled Resonator CMOS Flexural strength Optoelectronics Mechanical resonance Electrical and Electronic Engineering business |
| Zdroj: | Microelectronic Engineering. 88:2325-2329 |
| ISSN: | 0167-9317 |
| Popis: | In this contribution cross coupled beams MEMS resonator is presented in order to excite second in-plane flexural mode and provide more transduction area than a single beam in order to enhance the electrostatic signal measurement employing capacitive transduction in small resonators. Different configurations to excite the desired 250MHz mechanical resonance are explained, given details on the fabrication process. The influence on the electrical characterization due to the dimensional tolerance of the CMOS technology employed is discussed. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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