| Autor: |
Jean Michel Karam, J. Oudinot, H. El Tahawi, P. Drake, Andras Poppe, Marta Rencz, Vladimir Szekely, Ariel D. Cao, Bernard Courtois, H. Boutamine |
| Rok vydání: |
1997 |
| Předmět: |
|
| Zdroj: |
SPIE Proceedings. |
| ISSN: |
0277-786X |
| DOI: |
10.1117/12.284556 |
| Popis: |
In this paper, we report on the recent advances in building an integrated environment for the design and simulation of microsystems based on commercially available CAD tools. The environment allows a continuous design flow from front-end to back-end for both monolithic and hybrid microsystems. Based on the FEM simulation results in a pre-design phase, simulation models of available standard components are developed in a system level and coupled to layout generators. A multi-level, mixed-mode, multi-technology simulation is ensured and a schematic driven layout is generated. Tools for anisotropic etching simulation are integrated in order to predict the etching procedure of full-custom microstructures. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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