Multilayer-DLC film with low inner-stress prepared by pulsed laser deposition
| Autor: | 郭延龙 Guo Yanlong, 黎 伟 Li Wei, 陆益敏 Lu Yimin, 唐 璜 Tang Huang, 万 强 Wan Qiang, 黄国俊 Huang Guojun |
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| Rok vydání: | 2017 |
| Předmět: |
Materials science
Aerospace Engineering 02 engineering and technology 010402 general chemistry 021001 nanoscience & nanotechnology 01 natural sciences Atomic and Molecular Physics and Optics 0104 chemical sciences Pulsed laser deposition Stress (mechanics) Space and Planetary Science Electrical and Electronic Engineering Thin film Composite material 0210 nano-technology |
| Zdroj: | Infrared and Laser Engineering. 46:921001 |
| ISSN: | 1007-2276 |
| DOI: | 10.3788/irla201746.0921001 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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