| Autor: |
Wen H. Ko, Shem Benjamin Lachhman, Christian A. Zorman, Di Sun, Steve Majerus, Margot S. Damaser, Philip X.-L. Feng, Peng Wang |
| Rok vydání: |
2013 |
| Předmět: |
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| Zdroj: |
International Symposium on Microelectronics. 2013:000166-000170 |
| ISSN: |
2380-4505 |
| DOI: |
10.4071/isom-2013-ta55 |
| Popis: |
We report on the development of a non-hermetic micropackage technology that employs multiple layers of polydimethylsiloxane (PDMS), epoxy, and parylene-C thin films for conformal coating of chronic biomedical implantable systems with laboratory testing results in saline bath at 85°C, achieving very long micropackaging lifetime (up to ~2–5 years). By combining experiments of material characterization and qualitative analysis of the observations, we explain the measured long lifetimes of the micropackages (projected equivalent of ~2–5 years) using these non-hermetic coating materials and composites. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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