Efficient high-pass filtering with practical, high-yield X-ray transmission mirror optics
| Autor: | Joel D. Brock, David N. Agyeman-Budu, Arthur R. Woll |
|---|---|
| Rok vydání: | 2020 |
| Předmět: |
0303 health sciences
Radiation Photon Materials science Silicon 010308 nuclear & particles physics business.industry 030303 biophysics chemistry.chemical_element Condensed Matter Physics 01 natural sciences 03 medical and health sciences chemistry.chemical_compound Optics Silicon nitride chemistry Transmission (telecommunications) 0103 physical sciences Deep reactive-ion etching General Materials Science business High-pass filter Instrumentation Beam (structure) Microfabrication |
| Zdroj: | Powder Diffraction. 35:S3-S7 |
| ISSN: | 1945-7413 0885-7156 |
| Popis: | Although the concept, first demonstration, and potential applications of X-ray transmission mirrors (XTMs) were initially described over 30 years ago, only a few implementations exist in the literature. This is attributed to the unsolved challenge of a thick frame supporting a thin, reflecting membrane which does not itself block the transmitted beam. Here, we introduce a novel approach to solve this problem by employing silicon microfabrication. A robust XTM frame has been fabricated by using a novel two-step etch process, which secures the thin-film membrane without blocking the transmitted beam. Specifically, we have fabricated delicate XTM optics with 90% yield, which consist of 280-nm-thick low-stress silicon nitride membrane windows that are 1.5 mm wide and 125 mm long on silicon substrates. The XTM optics have been demonstrated to be a more efficient high-pass X-ray filter; for example, when configured for 40% transmission of 11.3 keV photons, we measure the reduction of 8.4 keV photons by a factor of 56. |
| Databáze: | OpenAIRE |
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