Microcontact printing of biomolecular gratings from SU-8 masters duplicated by Thermal Soft UV NIL
| Autor: | Amandine M. C. Egea, Christophe Vieu |
|---|---|
| Rok vydání: | 2011 |
| Předmět: |
Nanostructure
Materials science Silicon PDMS stamp chemistry.chemical_element Nanotechnology Molding (process) Condensed Matter Physics Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Nanoimprint lithography law.invention Template Resist chemistry law Microcontact printing Electrical and Electronic Engineering |
| Zdroj: | Microelectronic Engineering. 88:1935-1938 |
| ISSN: | 0167-9317 |
| DOI: | 10.1016/j.mee.2010.12.109 |
| Popis: | Thermal Soft UV nanoimprint lithography (NIL) was performed to replicate nanostructures in SU-8 resist. The SU-8 resist was structured with a PDMS stamp molded against an original silicon master which comported gratings of lines (500nm width/[email protected] pitch). The patterns obtained in SU-8 were used in a second step as a template for PDMS molding of daughter stamps. Pattern transfer quality and dimension control were achieved on these second generation PDMS stamps using AFM measurements. As a final validation of the whole duplication processes, these second generation PDMS stamps were finally employed to perform @mCP of streptavidin molecules on a glass slide activated by plasma O"2 treatment. AFM observation and fluorescence microscopy reveal that molecular patterns produced with SU8-molded PDMS stamps are not discernable from those obtained with a PDMS stamp directly molded on the original silicon master. Coupling Thermal Soft UV NIL and microcontact printing opens a new method for generating a large quantity of SU-8 templates on which functional PDMS stamps can be replicated in a reduced time. We thus propose a functional duplication process for soft-lithography implementation which may further reduce the cost of this technology for industrial development. |
| Databáze: | OpenAIRE |
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