| Popis: |
Large arrays of pyroelectric detectors; linear or two-dimensional, have the potential to satisfy many of the increasing requirements for IR detection and imaging using uncooled sensors. This paper examines the design of these arrays and the technologies required in their fabrication. Key design features are the interfacing of the pyroelectric elements with low noise silicon preamplifiers or multiplexers, the thermal isolation of the pyroelectric elements, and device structures which lead to a reduced susceptibility to microphony. The basis for these designs is the well established lead zirconate ceramic as the pyroelectric. The technologies include the reticulation of this material by ion beam milling, and the bonding techniques for mounting the detector elements such as solder bump bonding. |
