| Autor: |
A. Mashaw, Y. Lee, R.A. Gough, Ka-Ngo Leung, D. Wutte |
| Rok vydání: |
2002 |
| Předmět: |
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| Zdroj: |
Proceedings of the 1997 Particle Accelerator Conference (Cat. No.97CH36167). |
| DOI: |
10.1109/pac.1997.753402 |
| Popis: |
A titanium nitride (TiN) coating can reduce multipactoring problems in vacuum cavities and also reduce photoemission electrons from beam-pipe surfaces. A new technique is being explored at LBNL that will allow an efficient way to coat differently-shaped surfaces with TiN. In this technique, an RF-induction discharge with an exposed Ti induction antenna is employed. Tests are being performed using Ar, N, and a mixture of Ar-N gases. It is found that the characteristics of the TiN coating depends on the processing time and the gas that forms the discharge plasma. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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