Initial stages of nanoislands formation on Si(111) 7/spl times/7 surface

Autor:	A. V. Zverev, Z. Sh. Yanovitskaja, A.V. Vershinin, N.L. Shwartz, S.A. Teys
Rok vydání:	2005
Předmět:	Surface diffusion Materials science Silicon Diffusion chemistry.chemical_element Interatomic potential Atomic layer deposition chemistry Tetramer otorhinolaryngologic diseases sense organs Atomic physics Helium Surface reconstruction
Zdroj:	Proceedings. 6th Annual. 2005 International Siberian Workshop and Tutorials on Electron Devices and Materials, 2005..
ISSN:	1815-3712
Popis:	Investigation of a minimal stable nucleus on Si(111)-7/spl times/7 surface was carried out by interatomic potential calculations and STM image analyses. Potential relief for adatom diffusion through this surface was calculated using Tersoff potential. Calculations demonstrated that a tetramer formed in the center of 7/spl times/7 unit cell after low deposited dose may be considered as a minimal stable nucleus on Si(111)-7/spl times/7 surface.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::ec588a0c39e2ddcd24069a05112621b4 https://doi.org/10.1109/sibedm.2005.195571 Zobrazit plný text záznamu