22.4: Invited Paper: Pigmented Chemical Amplified Resist in Ultra-fine resolution Color Filter Application: Positive Versus Negative Tone

Autor:	Yi-Ming Cheng
Rok vydání:	2018
Předmět:	Tone (musical instrument) Materials science Optics Resist business.industry Color gel Resolution (electron density) Uv vis absorption Ultra fine business
Zdroj:	SID Symposium Digest of Technical Papers. 49:231-234
ISSN:	0097-966X
DOI:	10.1002/sdtp.12690
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::ec4eb447cbeb668127702d6e4eb966ae https://doi.org/10.1002/sdtp.12690 Zobrazit plný text záznamu Plný text