| Autor: |
S. Krey, H. Winkler, E. Dumitrescu, Matthias Wurm, I. Weingartner, F. Peter |
| Rok vydání: |
2004 |
| Předmět: |
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| Zdroj: |
2003 Conference on Lasers and Electro-Optics Europe (CLEO/Europe 2003) (IEEE Cat. No.03TH8666). |
| DOI: |
10.1109/cleoe.2003.1313530 |
| Popis: |
A new technology for the precise topography measurement of reflecting flat surfaces is presented in this paper. The instrument is capable of scanning large flats of about 500 mm/sup 2/. The instrument consists of a sensor head, which is an angle-measuring device, based on a CCD camera or a position sensitive detector (PSD). The sensor head includes a pentagon prism that reduces the pitch error in scan direction by a factor of about 100. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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