OS0106 Preparation of a cleaning sample with high adhesion force particles and its removal rate by PVA brush scrubbing and droplet train impact
| Autor: | Chikako Takato, Hirokuni Hiyama, Futoshi Iwata, Emu Tokuda, Toshiyuki Sanada, Akira Fukunaga |
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| Rok vydání: | 2016 |
| Předmět: | |
| Zdroj: | The Proceedings of Conference of Kanto Branch. :OS0106-1 |
| ISSN: | 2424-2691 |
| DOI: | 10.1299/jsmekanto.2016.22._os0106-1_ |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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