Comparison of interface structure of thin miscible films by grazing incidence x-ray scattering and high-resolution electron microscopy
| Autor: | Sarah Thompson, Thomas P. A. Hase, J.-J. Freijo, E. M. Ho, Amanda K. Petford-Long, Brian K. Tanner |
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| Rok vydání: | 2003 |
| Předmět: |
Materials science
Acoustics and Ultrasonics Condensed matter physics Silicon business.industry Scattering X-ray chemistry.chemical_element Surface finish Condensed Matter Physics Grain size Surfaces Coatings and Films Electronic Optical and Magnetic Materials Vacuum evaporation Optics chemistry Transmission electron microscopy Thin film business |
| Zdroj: | Journal of Physics D: Applied Physics. 36:A231-A235 |
| ISSN: | 1361-6463 0022-3727 |
| DOI: | 10.1088/0022-3727/36/10a/348 |
| Popis: | Grazing incidence x-ray scattering and cross-sectional high-resolution electron microscopy (HREM) have been applied to the study of thin trilayers of the miscible system Co–Cr–Co grown by ultra-high vacuum evaporation on silicon. Good agreement was found between numerical values for layer thickness deduced by the two techniques. The Co–Cr interface roughness was found to be low with substantial interdiffusion, significantly greater than the roughness amplitude. HREM images confirmed the diffuseness of the interfaces. The roughness had a lateral correlation length of typically 150 A and a very low fractal parameter h of 0.15. The correlation length was always found to correspond to the lateral grain size observed in the HREM images. |
| Databáze: | OpenAIRE |
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