Evaluation of surface temperature uniformity of multi-zone ceramic heaters with embedded cooling channels for electrostatic chuck
| Autor: | Kyeong Ho Jang, Hyung Ju Lee, Seong Hyuk Lee |
|---|---|
| Rok vydání: | 2022 |
| Předmět: | |
| Zdroj: | Journal of Mechanical Science and Technology. 36:1599-1606 |
| ISSN: | 1976-3824 1738-494X |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|
Full text from SpringerLink