On-chip CO2 sensor integrated with MEMS emitter and pyroelectric detector
Autor: | Hong Cai, Md Hazwani Khairy, Rachel Ang, Linfang Xu, Doris Ng, Nanxi Li, Zhonghua Gu, Anmin Kong, Weiguo Chen, Wen Wei Seit, Eva Wai Leong Ching, Norhanani Jaafar, Huanhuan Wang, Landobasa Y.M. Tobing, Leh Woon Lim, Qingxin Zhang, Lennon Yao Ting Lee |
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Rok vydání: | 2023 |
Zdroj: | Silicon Photonics XVIII. |
Databáze: | OpenAIRE |
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