Enhanced gate-controlled-diode current (EGCDC) measurement

Autor: P. Aum, Jen-Tai Hsu, Chand R. Viswanathan, D. Chan
Rok vydání: 2002
Předmět:
Zdroj: ICMTS 93 Proceedings of the 1993 International Conference on Microelectronic Test Structures.
DOI: 10.1109/icmts.1993.292895
Popis: A technique for the measurement of the gate-controlled-diode-current (GCDC) in short-channel MOS transistors is described. This technique uses the internal bipolar action of the MOS transistor to amplify the GCDC, thereby extending the sensitivity of the measurement. Results of measurements on small geometry devices, as well as on larger devices, are given. A model based on parasitic bipolar transistor action is given for the enhanced gate-controlled diode current (EGCDC). >
Databáze: OpenAIRE