Fabrication of CMUTs using sacrificial release process with ashing assisted polysilicon release
| Autor: | U Kin Che, Xin Liu, Yuanyu Yu, Jiujiang Wang, Sio Hang Pun, Fei Chen, Peng Un Mak, Mang I Vai |
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| Rok vydání: | 2022 |
| Zdroj: | International Conference on Biomedical and Intelligent Systems (IC-BIS 2022). |
| DOI: | 10.1117/12.2660554 |
| Databáze: | OpenAIRE |
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