Nanoindentation study of sputtered nanocrystalline iron thin films

Autor: C. Hayzelden, Robert C. Cammarata, Douglas T. Smith, J. B. Savader, M. R. Scanlon
Rok vydání: 1997
Předmět:
Zdroj: Scripta Materialia. 36:29-34
ISSN: 1359-6462
DOI: 10.1016/s1359-6462(96)00349-1
Popis: In this report, the mechanical behavior of nanocrystalline iron thin films prepared by sputtering is presented. The hardness of a series of as-deposited films with grain sizes between 10.3 and 21.0 nm displays a positive Hall-Petch slope although there is a great deal of scatter. A much better fit is obtained from hardness measurements made on a film with an as-deposited grain size of 11.4 nm that was annealed to increase its grain size up to 31.5 nm. These results are analyzed in terms of an Orowan bowing model that involves a grain size dependent term for the hardness proportional to d{sup {minus}1}.
Databáze: OpenAIRE