2D MEMS vector scanning mirrors for LIDAR, medical imaging, and high laser power applications
| Autor: | Thilo Sandner, Benjamin Mustin, Klemens Birnbaum, Martin Blasl, Thomas Graßhoff, Markus Schwarzenberg, Jan Grahmann |
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| Rok vydání: | 2023 |
| Zdroj: | MOEMS and Miniaturized Systems XXII. |
| DOI: | 10.1117/12.2668618 |
| Databáze: | OpenAIRE |
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