Direct-coupled FET logic circuits on InP

Autor: S.C. Shunk, Mark D. Feuer, J.-H. Huang, Tallis Y. Chang, T.A. Vang, K. Brown-Goebeler, Y. He
Rok vydání: 1991
Předmět:
Zdroj: IEEE Electron Device Letters. 12:98-100
ISSN: 1558-0563
0741-3106
Popis: A process technology for direct-coupled FET logic (DCFL) circuits on InP substrates, based on enhancement-mode InGaAs/InAlAs heterostructure-insulated-gate FETs (HIGFETs) is discussed. Its performance was demonstrated by fabricating 11- and 19-stage ring oscillators. The circuits were fabricated on undoped lattice-matched heterostructures grown by molecular beam epitaxy (MBE), using a refractory-gate process with self-aligned sidewalls to achieve a lightly-doped-drain (LDD) structure. For a gate length of 1.2 mu m, with V/sub dd/=2 V, the best propagation delay observed was 23 ps/stage, with associated power of 2.2 mW/stage. >
Databáze: OpenAIRE