The ADEQUAT project for development and transfer of 0.25 μm logic complementary metal–oxide–semiconductor modules

Autor:	Gilbert Declerck, F. Neppl, G. Janssen, Wilfried Vandervorst, A. Montree, C. Hill, H. Ryssel, A. van Ommen, J. Lorenz, M. Rudan, M. Haond, P. Felix, P. Patruno, R. DeKeersmaecker, Herman Maes, L. Van den hove
Rok vydání:	1994
Předmět:	Process (engineering) Computer science General Engineering Hardware_PERFORMANCEANDRELIABILITY Project organization Design for manufacturability Reliability (semiconductor) Development (topology) CMOS Hardware_GENERAL Logic gate Transfer (computing) Hardware_INTEGRATEDCIRCUITS Systems engineering
Zdroj:	Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 12:2852
ISSN:	0734-211X
Popis:	The ADEQUAT project [Advanced Developments for Quarter Micron complementary metal–oxide–semiconductor (CMOS) Technologies] is executed by a European consortium under the JESSI/ESPRIT programs. It aims at developing new device structures and process modules for the 0.35 and 0.25 μm CMOS logic technology generations, offering improved performance while meeting the reliability and manufacturability constraints. Several examples of choices illustrating this optimization process are presented together with the overall project organization and roadmap.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::eaa2d4135ca7d1bbcac062434d8ccbed https://doi.org/10.1116/1.587204 Zobrazit plný text záznamu