Micromechanical structure development for chemical analysis: study of porous silicon as an adsorbent

Autor: Maria Lucia Pereira da Silva, Elisabete Galeazzo, Francisco Javier Ramirez Fernandez, Rogerio Furlan, Silvana Gasparotto de Souza
Rok vydání: 1999
Předmět:
Zdroj: SPIE Proceedings.
ISSN: 0277-786X
DOI: 10.1117/12.364467
Popis: The aim of this work is to investigate the use of microchannels to concentrate pollutants present in the air. Devices with a length of 30 cm, a width of 100 micrometers and a depth of 30 micrometers , sealed by anodically bonded glass, were manufactured. Tests of adsorption characteristics were made using n-hexane. To reliably insert N2 contaminated with 1000 ppm of n-hexane in the microstructure, a simple setup was manufactured. This setup allows to insert the reactant, remove the amount of reactant adsorbed and to detect it. An amount of 20 mg was inserted in the microstructure. In order to improve the adsorption characteristics, PS layers were manufactured in the microchannels using silicon nitride as mask. The sealing of the microstructure with anodic bonded glass showed to be feasible either if the surface present PS or silicon nitride. Samples of PS layers covered by a plasma polymerized film, produced using HMDS, were analyzed by Raman microscopy. It was noticed that the nanocrystals are completely fulfilled by the deposited material, indicating the high reactivity of the PS layer.© (1999) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Databáze: OpenAIRE