Development of a Silicon-Based Electron Beam Transmission Window for Use in a KrF Excimer Laser System
| Autor: | F. Hegeler, C. H. Jun, P.J. Heitzenroeder, H. M. Fan, S. Raftopoulos, J. W. Hartfield, John J. Parker, R. F. Parsells, P. H. LaMarche, Charles Gentile, L. P. Ku, R.J. Hawryluk, John D. Sethian, M.C. Myers, M. Payen |
|---|---|
| Rok vydání: | 2003 |
| Předmět: |
Nuclear and High Energy Physics
Silicon Excimer laser business.industry Mechanical Engineering medicine.medical_treatment chemistry.chemical_element Nitride Laser law.invention chemistry.chemical_compound Nuclear Energy and Engineering Silicon nitride chemistry law medicine Optoelectronics General Materials Science Thin film Atomic physics business Inertial confinement fusion Civil and Structural Engineering Diode |
| Zdroj: | Fusion Science and Technology. 43:414-419 |
| ISSN: | 1943-7641 1536-1055 |
| Popis: | The Princeton Plasma Physics Laboratory (PPPL), in collaboration with the Naval Research Laboratory (NRL), is currently investigating various novel materials (single crystal silicon, , and ) for use as electron-beam transmission windows in a KrF excimer laser system. The primary function of the window is to isolate the active medium (excimer gas) from the excitation mechanism (field-emission diodes). Chosen window geometry must accommodate electron energy transfer greater than 80% (750 keV), while maintaining structural integrity during mechanical load (1.3 to 2.0 atm base pressure differential, approximate 0.5 atm cyclic pressure amplitude, 5 Hz repetition rate) and thermal load across the entire hibachi area (approximate 0.9 W {center_dot} cm superscript ''-2''). In addition, the window must be chemically resistant to attack by fluorine free-radicals (hydrofluoric acid, secondary). In accordance with these structural, functional, and operational parameters, a 22.4 mm square silicon prototype window, coated with 500 nm thin-film silicon nitride (Si{sub 3}N{sub 4}), has been fabricated. The window consists of 81 square panes with a thickness of 0.019 mm {+-} 0.001 mm. Stiffened (orthogonal) sections are 0.065 mm in width and 0.500 mm thick (approximate). Appended drawing (Figure 1) depicts the window configuration. Assessment of silicon (and silicon nitride) materialmore » properties and CAD modeling and analysis of the window design suggest that silicon may be a viable solution to inherent parameters and constraints.« less |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|