Development of a coplanar grating interferometer for displacement and angle measurements
| Autor: | Yi-Teng Hsu, Hung-Lin Hsieh |
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| Rok vydání: | 2022 |
| Zdroj: | Optics and Photonics for Advanced Dimensional Metrology II. |
| DOI: | 10.1117/12.2621531 |
| Databáze: | OpenAIRE |
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