Higher current density operation with EB reticle writer EBM-5000
| Autor: | Masato Saito, Hideaki Nishino, Tomotaka Higaki, Hidehiro Watanabe, Kunihiro Ugajin |
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| Rok vydání: | 2006 |
| Předmět: | |
| Zdroj: | SPIE Proceedings. |
| ISSN: | 0277-786X |
| Popis: | The performance of electron beam reticle writer EBM-5000(NFT) was examined with higher current density. The current density was raised up to 70A/cm 2 against to its standard current density 50A/cm 2 , and sufficiently good results were obtained with that operating condition. We concluded that the performance with that operating condition was good enough to produce photomasks for 65nm node devices. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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