A study on defect signal improvement using multi-scan optic patch images and new detection algorithm

Autor:	Sungyoon Ryu, Seunghyeok Son, Chan-Gi Jeon, Sujin Lee, Minho Rim, Yusin Yang, Younghoon Sohn
Rok vydání:	2023
Zdroj:	Metrology, Inspection, and Process Control XXXVII.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::ea5fa00ee95a176d9c2b0cc765779f24 https://doi.org/10.1117/12.2657845 Zobrazit plný text záznamu