Synergetics of surface sputtering by polyatomic ions
| Autor: | N. Yu. Turaev, V.N. Nikiforov, S. E. Maksimov, B. L. Oksengendler |
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| Rok vydání: | 2017 |
| Předmět: |
Surface (mathematics)
Shock wave Chemistry Polyatomic ion 02 engineering and technology 010402 general chemistry 021001 nanoscience & nanotechnology 01 natural sciences 0104 chemical sciences Surfaces Coatings and Films Ion Physics::Plasma Physics Sputtering Mass transfer Atomic physics Thin film 0210 nano-technology Synergetics (Haken) |
| Zdroj: | Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques. 11:1078-1081 |
| ISSN: | 1819-7094 1027-4510 |
| DOI: | 10.1134/s1027451017050329 |
| Popis: | The phenomenon of the sputtering of solids under bombardment with molecular ions is considered within the framework of synergetics. The complete sputtering process is divided into three stages with the help of the concept of three successive regimes: the implementation of a dynamic system, the appearance of a statistical system, and the achievement of a completely statistical system. The manifestation of the basic mechanisms is revealed: elastic cascades and mass transfer under the action of shock waves. |
| Databáze: | OpenAIRE |
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