Advances in pixel design and wafer fabrication for liquid crystal over silicon SLMs

Autor:	M. W. G. Snook, D. C. Burns, J.A. Breslin, David G. Vass, Ian Underwood, A. O'Hara
Rok vydání:	2002
Předmět:	Very-large-scale integration Materials science Silicon Pixel business.industry Circuit design chemistry.chemical_element Liquid crystal on silicon Wafer fabrication chemistry Hardware_INTEGRATEDCIRCUITS Optoelectronics Static random-access memory business Dram
Zdroj:	Digest IEEE/Leos 1996 Summer Topical Meeting. Advanced Applications of Lasers in Materials and Processing.
DOI:	10.1109/leosst.1996.540723
Popis:	In this paper we will discuss advances in silicon fabrication technology which have allowed the production of liquid crystal over silicon spatial light modulators (LCOS SLMs) with enhanced specification and performance. We will discuss advances in pixel circuit design and VLSI layout, for both DRAM and SRAM based pixels, which have resulted in higher pixel packing density and improved pixel performance. We will illustrate these advances using examples of our most recent SLM designs.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::ea50d1564e261768c64444a10ae08d22 https://doi.org/10.1109/leosst.1996.540723 Zobrazit plný text záznamu