Thick LiNbO3 layers on diamond-coated silicon for surface acoustic wave filters
| Autor: | Denis Remiens, Véronique Sadaune, X. Lansiaux, Elhadj Dogheche, Tadeusz Gryba |
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| Rok vydání: | 2002 |
| Předmět: |
Materials science
Physics and Astronomy (miscellaneous) Silicon business.industry Surface acoustic wave Lithium niobate chemistry.chemical_element Diamond engineering.material Sputter deposition chemistry.chemical_compound chemistry Surface wave Surface roughness engineering Optoelectronics Electrical measurements business |
| Zdroj: | Applied Physics Letters. 81:1329-1331 |
| ISSN: | 1077-3118 0003-6951 |
| DOI: | 10.1063/1.1501156 |
| Popis: | Surface acoustic wave (SAW) technology based on lithium niobate/diamond/silicon multilayered structures has been investigated due to the large demand of frequency filters for communication systems, particularly for cellular phones. Thick LiNbO3 layers (∼1 μm) with a good morphology, i.e., surface roughness lower than 10 nm have been grown at 490 °C on diamond-coated silicon substrates by multistep rf magnetron sputtering. A SAW devices operating at 300 MHz was designed and fabricated in order to validate the proposed structure; in particular, our main objective was to verify the high velocity in the layered structure. Preliminary filter responses were very promising: the SAW velocity was estimated to 8200 m/s and the coupling factor was K2∼0.93%. The film growth, the technology, and the electrical measurements are described in this letter. |
| Databáze: | OpenAIRE |
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