The angular distribution of sputtered atoms and the influence of topographic features

Autor:	Wang Zhenxia, Pan Jisheng, Tao Zhenlan, Zhang Jiping
Rok vydání:	1994
Předmět:	Angular distribution Materials science Transition metal Condensed matter physics Sputtering Surface structure General Materials Science Atomic physics Microstructure
Zdroj:	Journal of Materials Science Letters. 13:1585-1587
ISSN:	1573-4811 0261-8028
DOI:	10.1007/bf00626517
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::e9ce0f6c69e37e03661b68b5669c61fa https://doi.org/10.1007/bf00626517 Zobrazit plný text záznamu Full text from SpringerLink