Selective Area Epitaxy of Complex Oxide Heterostructures on Si by Oxide Hard Mask Lift-Off

Autor:	Ruiguang Ning, Soo Young Jung, Haneul Choi, Byeong-hyeon Lee, Min-Seok Kim, Hyung-Jin Choi, Jun Young Lee, Jin Soo Park, Sung-Jin Jung, Ho Won Jang, Sung Ok Won, Hye Jung Chang, Ji-Soo Jang, Kyu Hyoung Lee, Byung Chul Lee, Seung-Hyub Baek
Rok vydání:	2022
Předmět:	Electronic Optical and Magnetic Materials
Zdroj:	Electronic Materials Letters. 19:192-199
ISSN:	2093-6788 1738-8090
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::e995ff29252f807c4a67830a85218a53 https://doi.org/10.1007/s13391-022-00386-0 Zobrazit plný text záznamu Full text from SpringerLink