Single-Hole Charging and Discharging Phenomena in Carbon Nanotube Field-Effect-Transistor-Based Nonvolatile Memory
Autor: | Takahiro Ohori, Satoshi Nagaso, Kazuhiko Matsumoto, Kenzo Maehashi, Yasuhide Ohno, Koichi Inoue |
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Rok vydání: | 2010 |
Předmět: | |
Zdroj: | Japanese Journal of Applied Physics. 49:06GG13 |
ISSN: | 1347-4065 0021-4922 |
DOI: | 10.1143/jjap.49.06gg13 |
Popis: | We have fabricated nonvolatile memory based on top-gated carbon nanotube field-effect transistors (CNTFETs). Two kinds of insulating films, SiN x and SiO2, were deposited to control the hysteresis characteristics after the removal of water molecules around the single-walled CNT channels. The interface between the SiN x and SiO2 films is expected to act as a charge storage node of nonvolatile memory. The fabricated CNTFET-based memory devices clearly exhibited not only a memory effect but also good retention characteristics for charge storage. Furthermore, single-hole charging and discharging phenomena were clearly observed in the CNTFET-based memory devices by reducing the number of carriers trapped in the interface between the SiN x and SiO2 films. These results indicate that the CNTFET-based nonvolatile memory can be potentially used to realize single-electron memory. |
Databáze: | OpenAIRE |
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