CH4 Concentration Distribution in a Semiconductor Process Chamber Measured by the CT-TDLAS

Autor:	Takahiro Kamimoto, Masakazu Minami, Yoshihiro Deguchi, Daisuke Hayashi, Kazuki Fujita, Junya Nakai
Rok vydání:	2018
Předmět:	010302 applied physics 010309 optics Optics Materials science Distribution (number theory) business.industry Semiconductor device fabrication 0103 physical sciences business 01 natural sciences Electronic Optical and Magnetic Materials
Zdroj:	ECS Journal of Solid State Science and Technology. 7:Q211-Q217
ISSN:	2162-8777 2162-8769
DOI:	10.1149/2.0231811jss
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::e95031a5cfe6c31d0d25e3745842205b https://doi.org/10.1149/2.0231811jss Zobrazit plný text záznamu