Deposition of W/a-C:H:Zr and W/a-C:H:W multilayer coatings on substrate made of porous graphite by arc – Electron beam hybrid method
| Autor: | Maria Richert, Stanisław Pietrzyk, Adam Mazurkiewicz, P. Pałka, Ilona Nejman, Jerzy Smolik, Beata Leszczyńska-Madej, Paulina Zawadzka |
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| Rok vydání: | 2016 |
| Předmět: |
Materials science
chemistry.chemical_element 02 engineering and technology engineering.material Tungsten Electron beam physical vapor deposition symbols.namesake Coating Materials Chemistry Graphite 020502 materials Metallurgy Surfaces and Interfaces General Chemistry 021001 nanoscience & nanotechnology Condensed Matter Physics Microstructure Evaporation (deposition) Surfaces Coatings and Films 0205 materials engineering Chemical engineering chemistry engineering symbols 0210 nano-technology Raman spectroscopy Layer (electronics) |
| Zdroj: | Surface and Coatings Technology. 300:19-24 |
| ISSN: | 0257-8972 |
| DOI: | 10.1016/j.surfcoat.2016.05.035 |
| Popis: | The W/a-C:H:Zr and W/a-C:H:W multilayer coatings were prepared on a porous graphite substrate by hybrid method combines of arc evaporation and electron beam evaporation processes (Arc-EB). The tungsten interlayer was deposited first to enhance coating adhesion. Phase composition of coatings was examined by Raman spectroscopy and X-ray diffraction. The measurement of hardness and Young's modulus has indicated a significant increase in mechanical properties after the deposition of upper layer. Microstructure was investigated by SEM and TEM revealing columnar morphology and lack of porosity in both samples. The a-C:H:Zr coating was characterized by lower wettability by liquid copper than a-C:H:W coating and pure tungsten interlayer. |
| Databáze: | OpenAIRE |
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