| Autor: |
Victor M. Bright, John H. Comtois, J.R. Reid |
| Rok vydání: |
2002 |
| Předmět: |
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| Zdroj: |
Digest IEEE/Leos 1996 Summer Topical Meeting. Advanced Applications of Lasers in Materials and Processing. |
| Popis: |
An optical mirror for directing a laser parallel to the substrate surface has been designed and fabricated. The mirror consists of a 214 /spl mu/m/spl times/210 /spl mu/m, 3.5 /spl mu/m thick polysilicon plate, coated with a 0.5 /spl mu/m thick layer of gold. The mirror is connected to the substrate by 3 floating substrate hinges. Using microprobes, the mirror is lifted off of the substrate and up into a latch mechanism. The latch holds the mirror normal to the substrate. The floating substrate hinges are connected to a 200 /spl mu/m diameter circular 2.0 /spl mu/m thick polysilicon plate. This plate is mounted to the substrate via a rotating sliding anchor. The mirror is designed to be driven by an array of thermal actuators. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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