Coaxial ion micro-source for VP/ESEM – E-beam impact mode
| Autor: | W. Slówko, Artur Wiatrowski |
|---|---|
| Rok vydání: | 2016 |
| Předmět: |
010302 applied physics
Ion beam business.industry Scanning electron microscope Chemistry Analytical chemistry Ion current 02 engineering and technology 021001 nanoscience & nanotechnology Condensed Matter Physics Ion gun 01 natural sciences Focused ion beam Surfaces Coatings and Films Ion beam deposition Optics 0103 physical sciences Coaxial 0210 nano-technology business Instrumentation Environmental scanning electron microscope |
| Zdroj: | Vacuum. 132:53-61 |
| ISSN: | 0042-207X |
| DOI: | 10.1016/j.vacuum.2016.07.027 |
| Popis: | The coaxial ion micro-source was developed as a part of the multi-functional equipment for SEM. This equipment contains a quadruple BSE ionization detector for 3D imaging and an axial SE detector serving optionally as the ion micro-source. The ion micro-source may be made as an independent unit as well. The source has been designed in the form of extended Pressure Limiting Aperture (PLA) used commonly in Variable Pressure/Environmental Scanning Electron Microscopes (VP/ESEM), so no additional vacuum arrangements are needed. Additionally, the vacuum-detector head was developed to provide an intermediate vacuum space necessary to apply the source in a classic SEM. The source operates at argon pressure of 100 Pa and delivers an ion current of a few μA at ions energy of 4 keV, which enables drilling or stripping away layers of material with lateral resolution of about 10 μm. The ion micro-source may work in two regimes: the glow discharge mode or the electron beam impact mode. Preliminary experiments were conducted on JSM 840 microscope equipped with the mentioned vacuum-detector head extending its capabilities to 3D VP/ESEM. The paper presents and roughly explains some noticed regularities in the source functioning basing on its simple and intuitive model. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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