Spectral properties and thermal stability of CrN/CrON/Al2O3 spectrally selective coating
| Autor: | J.S. Fang, T.K. Tsai, Y.H. Li |
|---|---|
| Rok vydání: | 2016 |
| Předmět: |
010302 applied physics
Materials science Metals and Alloys Analytical chemistry 02 engineering and technology Surfaces and Interfaces engineering.material Sputter deposition 021001 nanoscience & nanotechnology 01 natural sciences Surfaces Coatings and Films Electronic Optical and Magnetic Materials chemistry.chemical_compound chemistry Coating Phase (matter) 0103 physical sciences Absorptance Materials Chemistry engineering Thermal stability 0210 nano-technology Chromium nitride Layer (electronics) Refractive index |
| Zdroj: | Thin Solid Films. 615:91-96 |
| ISSN: | 0040-6090 |
| DOI: | 10.1016/j.tsf.2016.06.055 |
| Popis: | Multilayered CrN(H)/CrN(L)/CrON/Al 2 O 3 spectrally selective coatings, designed with a gradually decreasing refractive index from the base layer to the top layer, were deposited on stainless steel substrates by reactive DC magnetron sputtering. The thicknesses of the CrN(H), CrN(L), CrON, and Al 2 O 3 layers were optimized to achieve the best spectral properties. The thermal stability test was carried out at 300–500 °C in air. An absorptance of 0.93 and a thermal emittance of 0.14 were obtained when the CrN(H)/CrN(L)/CrON/Al 2 O 3 multilayer coating comprised 60 nm-thick CrN(H), 50 nm-thick CrN(L), 40 nm-thick CrON, and 40 nm-thick Al 2 O 3 layers. The CrN(H)/CrN(L)/CrON/Al 2 O 3 was thermally stable up to 400 °C in air. Oxidation of the CrN(L) layer and phase transformation of the CrON layer destroyed the multilayered structure and degraded the spectral properties when the CrN(H)/CrN(L)/CrON/Al 2 O 3 was heated at 500 °C in air. |
| Databáze: | OpenAIRE |
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