Updating of the toroidal electron spectrometer intended for a scanning electron microscope and its new applications in diagnostics of micro- and nanoelectronic structures
| Autor: | A. V. Gostev, A. A. Trubitsyn, E. I. Rau, N. A. Orlikovskii |
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| Rok vydání: | 2013 |
| Předmět: |
Conventional transmission electron microscope
Electron spectrometer Materials science Physics and Astronomy (miscellaneous) business.industry Scanning confocal electron microscopy law.invention Optics Electron tomography law Scanning transmission electron microscopy Electron beam-induced deposition Electron microscope business Environmental scanning electron microscope |
| Zdroj: | Technical Physics. 58:447-454 |
| ISSN: | 1090-6525 1063-7842 |
| Popis: | A new version of the toroidal electron spectrometer installed in a scanning electron microscope is described. The new instrument has made it possible to carry out fundamental and applied research in the field of local nondestructive inspection of micro- and nanoelectronic materials and devices. The topology control of 3D microstructures by backscattered electron tomography is exemplified. A high efficiency of secondary electron energy filtering in monitoring of semiconductor regions locally doped by p- and n-type impurities is demonstrated. A physical substantiation for the high contrast of the doped regions is given. The feasibility of taking electron spectra using a scanning electron microscope in a wide range from slow secondary electrons to elastically scattered ones is proved. |
| Databáze: | OpenAIRE |
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