Masks and metallic electrodes compounds for silicon biosensor integration
| Autor: | Elena Manea, Cristian Ravariu, Florin Babarada |
|---|---|
| Rok vydání: | 2017 |
| Předmět: |
Fabrication
Materials science Immobilized enzyme Silicon chemistry.chemical_element Nanotechnology 02 engineering and technology 010402 general chemistry 01 natural sciences law.invention law Materials Chemistry Microelectronics Wafer business.industry Mechanical Engineering Transistor Metals and Alloys 021001 nanoscience & nanotechnology 0104 chemical sciences chemistry Mechanics of Materials Field-effect transistor 0210 nano-technology business Biosensor |
| Zdroj: | Journal of Alloys and Compounds. 697:72-79 |
| ISSN: | 0925-8388 |
| DOI: | 10.1016/j.jallcom.2016.12.099 |
| Popis: | The biosensors coupled to Field Effect Transistors, briefly labelled as BioFET, require the co-integration of the bio-receptor elements with the electron device. This demand involves compatibility among the technologies and materials. This paper presents the main fabrication steps of an enzymatic transistor designed to be sensitive to glucose. The main technological flow is based on the classical MOSFETs microelectronic technology in 6 masks, plus a sensitive detection area, configured across the gate space by the 7-th mask, dedicated to bioreceptors. To anchor the enzyme layer onto a Silicon wafer, an intermediary nano-structured TiO2 layer grown by anodization is firstly used. The TiO2 material offers an optimum nano-porosity and biocompatibility with the enzyme. For the glucose-oxidase enzyme immobilization, the nafion and finally the glutaraldehyde agent is used as crosslink polymerization elements. The surface characterization is performed by ATR-FTIR spectroscopy and SEM imaging. Finally, in a discussion section, further details to support the BioFET functionality, are provided. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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