Laser-induced surface cleaning from diamond particles

Autor:	V. G. Mihalevich, Vitali I. Konov, V. V. Kononenko, K. V. Zhuk, Sergej M. Pimenov, A. M. Lomonosov
Rok vydání:	2002
Předmět:	In situ Materials science Silicon Analytical chemistry chemistry.chemical_element Diamond Substrate (electronics) engineering.material Laser law.invention Semiconductor laser theory chemistry Optical microscope law engineering Ultrasonic sensor Composite material
Zdroj:	SPIE Proceedings.
ISSN:	0277-786X
DOI:	10.1117/12.456829
Popis:	Kr-laser removal of micro and nano sized diamond particles deposited on Si substrates from alcohol solution in an ultrasonic bath has been investigated. The process control was performed ex situ by optical microscopy and in situ by measurements of the acoustic signals in the substrate and in the surrounding air. Optimal cleaning conditions as well as substrate surface damage threshold were found. The mechanism of diamond particles laser removal process was studied.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::e894c5d7bdf8d389ecd3b681a6ee5772 https://doi.org/10.1117/12.456829 Zobrazit plný text záznamu