Development of ion implantation equipment in the USSR

Autor:	A.F. Vyatkin, V.V. Simonov, A.I. Kholopkin
Rok vydání:	1991
Předmět:	Nuclear and High Energy Physics Engineering Retrospective review Ion implantation business.industry business Instrumentation Engineering physics
Zdroj:	Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 55:386-392
ISSN:	0168-583X
DOI:	10.1016/0168-583x(91)96199-u
Popis:	A retrospective review of the development of ion implantation equipment in the USSR is presented and modern design philosophies are highlighted. The main developments made by Soviet scientists in the field of ion implantation over the past 30 years are reviewed.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::e8238e9b123c4674e133d48c8da2293a https://doi.org/10.1016/0168-583x(91)96199-u Zobrazit plný text záznamu