The enhanced voltage-dividing potentiometer for high-precision feature placement metrology

Autor:	C.H. Ellenwood, L.W. Linholm, Michael W. Cresswell, Richard A. Allen
Rok vydání:	1996
Předmět:	Engineering Observational error business.industry Voltage divider Feature extraction Metrology Feature (computer vision) Electronic engineering Potentiometer Electrical and Electronic Engineering business Instrumentation Lithography Voltage
Zdroj:	IEEE Transactions on Instrumentation and Measurement. 45:136-141
ISSN:	0018-9456
DOI:	10.1109/19.481325
Popis:	Enhancements to the voltage-dividing potentiometer, an electrical test structure for measuring the spatial separations of pairs of conducting features, are presented and discussed. These enhancements reduce or eliminate systematic errors which can otherwise lead to uncertainties as large as several hundred nanometers. These systematic errors, attributed by modeling to asymmetries at certain intersections of conducting features in the test structure, are eliminated by modifications to the test structure and test procedures.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::e810c6d4ce7319be27caa378abf5b90d https://doi.org/10.1109/19.481325 Zobrazit plný text záznamu