Self-Assembly for Semiconductor Industry
| Autor: | Ann Marie Sastry, Wei Lu |
|---|---|
| Rok vydání: | 2007 |
| Předmět: |
Fabrication
Materials science Manufacturing process Semiconductor device fabrication Nanotechnology Condensed Matter Physics Industrial and Manufacturing Engineering Electronic Optical and Magnetic Materials Semiconductor industry Assembly planning Nanolithography Hardware_INTEGRATEDCIRCUITS Electronics Electrical and Electronic Engineering |
| Zdroj: | IEEE Transactions on Semiconductor Manufacturing. 20:421-431 |
| ISSN: | 0894-6507 |
| Popis: | Fabrication technologies for the semiconductor industry have enabled ever-smaller devices but now face fundamental limits in creating nanoscale products. Self-assembly has recently emerged as a promising alternative fabrication technology for functional nanoscale systems. Such processes can be made parallel and are capable of producing three-dimensional structures with ~10 nm precision. This paper reviews developments, applications and challenges of self-assembly methods for the semiconductor industry. Although a fully self-assembled nanoscale system has not yet been commercially achieved, the work reviewed and discussed here demonstrates a solid scientific foundation in pursuing this goal. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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