| Autor: | S Bosch, F Monzonis |
|---|---|
| Rok vydání: | 1995 |
| Předmět: |
Silicon
business.industry Chemistry Inversion methods Oxide chemistry.chemical_element Condensed Matter Physics Electronic Optical and Magnetic Materials Characterization (materials science) chemistry.chemical_compound Optics Ellipsometry Materials Chemistry Monochromatic color Electrical and Electronic Engineering business Refining (metallurgy) |
| Zdroj: | Semiconductor Science and Technology. 10:1634-1637 |
| ISSN: | 0268-1242 |
| DOI: | 10.1088/0268-1242/10/12/012 |
| Popis: | A method for the characterization of oxide-polysilicon-oxide on silicon by monochromatic ellipsometry is presented. By refining a previous work which enabled an estimation of the thickness of the top oxide from a single ( Delta , psi ) measurement, the procedures we propose here allow the simultaneous determination of two unknowns in our samples. The practical process is illustrated by several examples, using a graphical approach which follows from our inversion methods. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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