A novel optical gas sensor based on sputtered InxOyNz films with gold-nano-dots
| Autor: | R. Chabicovsky, E. Obermeier, A. Schleunitz, Ulrich Gernert, H. Steffes |
|---|---|
| Rok vydání: | 2006 |
| Předmět: |
Materials science
Hydrogen business.industry Photoresistor Physics::Optics chemistry.chemical_element Condensed Matter Physics Hydrogen sensor Atomic and Molecular Physics and Optics Surfaces Coatings and Films Electronic Optical and Magnetic Materials law.invention Optics chemistry law Nano Gas detector Electrical and Electronic Engineering Thin film business Sensitivity (electronics) Light-emitting diode |
| Zdroj: | Microelectronic Engineering. 83:1197-1200 |
| ISSN: | 0167-9317 |
| DOI: | 10.1016/j.mee.2006.01.153 |
| Popis: | In this paper we present new results achieved with a sputtered multilayer system consisting of In"xO"yN"z and gold-nano-dots. This system shows not only electrical but also optical gas sensitivity. The optical sensing effect is enhanced by the gold-nano-dots which are randomly distributed on and inside each In"xO"yN"z layer. The optical measuring system consists of a tuneable light source (or alternatively of a simple light emitting diode) and a CdS-photoresistor. As an example of the optical gas sensing effect we show the sensitivity to hydrogen at a temperature of 400^oC. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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