Chemisorption-induced microcantilever deflection: a theoretical model

Autor:	Shou-Wen Yu, Gan-Yun Huang, Xi-Qiao Feng, Ji-Qiao Zhang
Rok vydání:	2013
Předmět:	Valence (chemistry) Cantilever Materials science Surface stress Analytical chemistry Condensed Matter Physics Molecular physics Computer Science::Other Condensed Matter::Materials Science Cantilever bending Adsorption Chemisorption Deflection (engineering) Physics::Atomic and Molecular Clusters Molecule
Zdroj:	Philosophical Magazine Letters. 93:183-195
ISSN:	1362-3036 0950-0839
DOI:	10.1080/09500839.2012.759292
Popis:	Microcantilever-based techniques are often used to measure the changes of surface stress and infinitesimal mass induced by adsorbed atoms/molecules on the cantilever surface. In this paper, an energy method using a valence force model is presented to study the cantilever bending behaviour induced by chemisorption. The surface stress change induced by chemisorption is estimated. The chemisorption of oxygen on Si(100) surface is taken as a representative example. The results are consistent with relevant experimental observations. It is shown that chemisorption-induced deformation behaviour of cantilevers shows a distinct dependence on the bond configurations formed by adsorbed atoms and substrate atoms, as illustrated by the Si(100)-O cluster in this paper. The study is helpful for the optimal design of microcantilever-based measurement techniques.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::e78ec5acc6e208b8aeb038d6c59ce53c https://doi.org/10.1080/09500839.2012.759292 Zobrazit plný text záznamu Plný text ve formátu PDF Plný text ve formátu HTML
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