In Situ Characterization of Ferroelectric HfO 2 During Rapid Thermal Annealing

Autor:	Valerio Adinolfi, Vijay K. Narasimhan, Martin E. McBriarty, Karl A. Littau, Michael F. Toney, Apurva Mehta, Donata Passarello
Rok vydání:	2021
Předmět:	In situ Materials science Chemical engineering General Materials Science Rapid thermal annealing Condensed Matter Physics Ferroelectricity Hafnium oxide Characterization (materials science)
Zdroj:	physica status solidi (RRL) – Rapid Research Letters. 15:2000598
ISSN:	1862-6270 1862-6254
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::e786edb1d667e1ed70dc40b7921e871a https://doi.org/10.1002/pssr.202000598 Zobrazit plný text záznamu Plný text